Technische Physik

    Nanotechnology Services

    The group is responsible for the operation and maintenance of the semiconductor processing equipment in the cleanroom. The technicians support the PhD and diploma students working in the cleanroom with their longtime experience in the field of nanofabrication. In addition, they process samples for external groups and students working on transport and optical spectroscopy. The technicians perform a wide range of tasks, ranging from simple, routine processing steps up to the fabrication of complete devices.



    Lehrstuhl für Technische Physik
    Am Hubland
    97074 Würzburg

    Phone: +49 931 31-85100
    Fax: +49 931 31-85103

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    Hubland Süd, Geb. P1 Hubland Süd, Geb. P2