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    X-Ray Microscopy


    X-ray microscope XRM II/Scanning Electron Microscope

    X-Ray Microscope XRM II

    Source: Customized JEOL JSM-7100F Vacc 30kV Imax 400nA
    Reflection Target: Nanostructured molybdenum and tungsten
    Detector: Photon-counting direct-converting X-ray detector with 1024x512 pixels
    Magnification: up to 1000 Resolution: down to 50nm Fully 3D imaging possible through piezo-powered rotational axis

    Scanning Electron Microscope

    SEI Resolution:            1.2 nm @ 30kV
    Magnification:              10 to 1 000 000
    Accelerating Voltage:  0.2 to 30 kV
    Current:                          10^-12 to 4*^10^-7 A
    Electron Gun:                 In-lens Schottky field emission gun

    Wide-and-Small-Angle-X-Ray_Scattering (SAXS und WAXS)
    • Source: Rigaku microfocus-source with rotating anode (capacity: 1,2 kW)

    • Multilayer: Parabolic Goebel mirror for the Cu-Kα-line at 1.54 Å

    • Collimators: 3 motorised collimators each with 4 individually mobile hybrid-blades (monocrystal)

    • Axes: 3-linear axes each for detector- and positioning of sample with an additional 360°-rotation achse for rotatability of sampler

    • Sample Environment: Holding device for up to 8 solid samples, capillary holding device for up to 10 capillaries, holding device with heating for 1 capillary (temperature range: -5 – 80 °C)

    • Detectors: Dectris EIGER 1M (1035 x 1065 Pixel, Pixel size: 75 µm)

    Liquid metal jet anode (LMJ)

    Liquid metal jet anode (LMJ)

    The experiment is set up in an inter-locked x-ray hutch with 6 mm lead-shielding. The sample stage and the detector are built on a vibration damped granite base, both their axes are motorized. The maximum focus-detector distance equals 1.40 m.

    Source: Excillum JXS D1 with specs:

    • 70 kV max. acceleration voltage
    • 200W max. output power
    • 10 mu min. electron focus
    • Target: liquid Ga-In-Sn alloy

    Sample stage

    • 2 circle goniometer (X-Huber, Germany)
    • sample lift (X-Huber, Germany)
    • sample translation (Micos PI GmbH, Germany)
    • continuous rotation (Leuven Air Bearing, Belgium)
    • piezoelectric 2-axis fine positioning (atocube, Germany)

    Scintillator-based indirect detector

    • P43 high-resolution phosphor screen (Proxivision, Germany)
    • Rodenstock XR-Heliflex lens
    • Nikkor Telephoto lens
    • Andor NEO sCMOS detector (2180 x 2560 pixels, 100 fps)
    • max. field of view 33.3 mm x 28.3 mm (13 mu pixelsize)


    • phase contrast and holo-CT of biological specimen
    • in situ fast CT for materials testing / fatigue
    • novel detector development (high-res and high-speed)